Fault Phenomenon |
Cause |
Solution |
Rough valve can not be opened |
Compressed improper air pressure |
Pressure should be 0.4-0.6MPa. |
Electromagnetic directional valve of rough valve can’t work. |
Refer to fault phenomenon 2 |
|
Overtravel-limit switch of high vacuum valve is not compacted. |
Adjust switch and upper cover plate to a suitable place. |
|
Electromagnetic directional valve can’t work. |
No actuation with electricity |
Change coil or whole valve |
Working temperature is low. |
Temperature should be higher than 5℃. |
|
Valve Pump body is blocked. |
Clean valve body and add pump oil |
|
Air source pressure is not enough. |
Pressure should be 0.4-0.6MPa |
|
Fore valve can not be opened. |
Deficient air pressure |
Refer to fault phenomenon 2 |
Electromagnetic directional valve can’t work. |
Refer to fault phenomenon 2 |
|
High vacuum valve can not be opened. |
Overtravel-limit switch of rough valve is not compacted. |
Adjust switch and upper cover plate to a suitable place |
Gas source pressure is not enough. |
Should be 0.4-0.6MPa |
|
Electromagnetic directional valve |
Refer to fault phenomenon 2 |
|
Vacuum degree is not enough (Can not reach vacuum meter setting value) |
Compound vacuum meter(working) setting value is not less than 5Pa |
|
Front valve is not opened. |
Open front valve under a certain condition |
|
Roots pump is not opened. |
Vacuum electric contact pressure gage can’t work well. |
Pumping air, make big round meter indicator to the left end |
Time-delay is not completed |
Wait |
|
Air switch is not connected |
Connect switch if no issue |
|
Diffusion pump can’t work. |
Heating time is not enough |
KT-400 requires 1 hour; KT-600 requires 80 minutes |
Oil pollution |
Change pump oil (Dalian NO.3) |
|
Vacuum rough pumping is not high. |
Vacuum degree should be higher than 5Pa. |
|
Cooling water is not unimpeded. |
Clean pump cooling water path |
|
Improper oil volume |
Add oil or release oil |
|
Air inflation can not work. |
Rough valve and high vacuum valve overtravel-limit switch is not compacted |
Adjust switch and upper cover plate to a suitable place |
Electromagnetic charging valve is not working |
Change coil or valve |
|
Fan is not opened. |
Electro connecting pressure can’t work well. |
Wait for inflation pressure until 0.02MPa |
Rough valve and high vacuum valve overtravel-limit switch is not compacted. |
Adjust switch and upper cover plate to a suitable place |
|
Air switch is not connected. |
Connect switch if no issue |
|
Motor is damaged. |
Fix or change motor |
|
Heating current is not balanced confoundedly. |
Heating voltage close to rated value, current is 0, heater band is broken. |
Use molybdenum filament to connect or change heater band |
Heater band is connected with wall. |
Use ceramic parts to insulate |
|
Mutual inductor is broken with voltage but no current. |
Change mutual inductor |
|
Ammeter and voltmeter are broken. |
Change meters |
|